抄録
Ti-Si-N nanocomposite coatings with Si content between 0 and 13.5 at% were deposited by a combined DC/RF unbalanced reactive magnetron sputtering process. Super high hardness (>40 GPa) was measured in the coatings with silicon content at about 8 at%. The RF power applied to the Si targets was found to have a significant influence on the microstructure and mechanical properties of the coatings. Ultra-high erosion resistance was observed in a micro sand-blasting test using 17 micron alumina particles, which demonstrated high potential for applications in aircraft compressor blades and other abrasive wear components.
