抄録
--We have successfully microfabricated a thick metal oxide films onto the predefined sites on glass, silicon wafer, and polymeric sheet through a monolayer-template-patterning (MTP) technique in aqueous media. Hydrophobic self-assembled monolayers (SAMs), i.e., fluoroalkylsilane or alkylsilane molecules, were used to fabricate the high-quality SAM templates on each substrate. Particulate tin oxide films were deposited from tin chloride aqueous solution. In this study, polyimide (PI) sheet was employed. Ultrathin SiOx layer, i.e., Oxide nanoskin (ONS), was previously formed onto the PI substrate to achieve good adherence between the metal oxide film and the PI surface. Photolithographically micropatterned hydrophobic-SAM layer on the ONS was used as an ultrathin molecular template. Although the metal oxide film was homogeneously deposited onto entire surface of the template, the deposits on the SAM-covered regions were completely eliminated by solution lithography using absolute toluene, resulting in the formation of the well-defined microstructures of the metal oxide.
