2019 年 14 巻 p. 3401085
An ECR sheet plasma device employing a 2.45 GHz microwave source and combination of permanent magnets and field coils is being developed. The combined field realized a linear magnetic field that sustained a rectilinear confinement of the plasma. The ECR condition effectively lowered the plasma ignition power to below 500 W and minimum plasma sustaining power to 94 W while also increasing the pressure range of low power ignition. Low ignition power is observed while plasma density is highest at 0.7 - 0.3 Pa pressure range. Stable plasma operation at input microwave power of up to 3 kW was achieved without overheating in the quartz window region with the aid of a gas feed mechanism on the quartz window.
