ICT data-driven active laser processing

Abstract

Laser processing is widely used as a precision microfabrication technology. Recently we are working on the R&D of “ICT data-driven active laser processing” to control process parameters actively by high-speed laser modulation based on ICT data from in-process monitoring and AI parameter optimization. In this report, high-speed ultrashort pulse laser modulation and in-process monitoring of laser-induced periodic surface nanostructures on glass materials will be introduced. The ICT data-driven active laser processing would be beneficial to next-generation higher precision and productivity.