抄録
This paper describes the chemical and morphological properties of super water-repellent surface of solid materials prepared by a 13.56 MHz inductively coupled plasma using fluorohydrocarbons such as vinylidene fluoride and 1, 1, 1, 2-tetrafluoroethane. Through the reaction initiated by the electron impact into fluorohydrocarbon molecules, fluorine-containing and hydrophobic polymers grew in the gas phase to deposit on substrates. The morphology of deposits seems to depend on hydrophilicity or hydrophobicity of substrates. The more hydrophilic substrate may maintain the smaller granular structure than ca. 100-nm diam. However, polymer granules may be expanded radially by surface tension and get into flat on hydrophobic substrates. Dynamic plasma CVD we proposed enabled us to control the size of deposited granules on the surface to be smaller and improve the fluorine content to be richer. Thus, we could easily obtain super water-repellent thin film with gradation in granular size and chemical compositions.
