Determination of Young's Modulus of Polymer Aggregate Based on Hertz Theory

Abstract

Elastic property of polymer aggregates in a resist pattern is characterized by using atomic force microscope (AFM). In order to determine Young's modulus of polymer aggregates based on Hertz theory, a separation force between polymer aggregates is measured by using the AFM. Young's modulus of polymer aggregates composing resist pattern can be determined to be 10-25MPa. The results of our experiment clearly show that the polymer aggregates indicates relatively low cohesion property.