Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Photochemical Synthesis of Metal-Containing Ultrafine Particles Applicable to Nanolithography and Nanodevices
Hiroshi Morita
Author information
JOURNAL FREE ACCESS

2008 Volume 21 Issue 6 Pages 767-775

Details
Abstract

From gaseous mixtures involving iron pentacarbonyl (Fe(CO)5) and carbon disulfide (CS2), spherical ultrafine particles involving organometal compounds were synthesized under light irradiation at 313 nm. Chemical structure and chemical composition were changed by post-exposure with UV light and by the application of a magnetic field. By the post-exposure with 266 nm light upon the deposited particles, volatile fragments such as Fe(CO)n (n=1∼3) were evolved in addition to CO. The particle size was effectively diminished to as small as 58 nm by shortening the irradiation time up to 1 s. Upon exposure to intense laser light, photochemical reaction during aerosol particle formation changed dramatically and gaseous mixtures involving Fe(CO)5 produced magnetic particles. By controlling the convectional flow of the entire gaseous sample, linearly aggregated particles (i.e., particle-wires) were successfully produced. Potential applica- tions of the particle-wires to nanolithography and in constructing nanodevices were discussed briefly. From solid materials such as poly(dimethylsilane), spherical particles were produced in the atmosphere of trimethylsilyl azide by the aid of laser ablation. Technical advantages in producing spherical particles from solid materials were also discussed.

Content from these authors
© 2008 The Society of Photopolymer Science and Technology (SPST)
Previous article Next article
feedback
Top