Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material

Journal of Photopolymer Science and Technology

Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244

Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material

Tadatomi Nishikubo, Hiroto Kudo, Yuji Suyama, Hiroaki Oizumi, Toshihiro Itani

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Keywords: noria, adamantine, chemically amplification, extreme ultraviolet, resist

JOURNAL FREE ACCESS

2009 Volume 22 Issue 1 Pages 73-76

DOI https://doi.org/10.2494/photopolymer.22.73

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© 2009 The Society of Photopolymer Science and Technology (SPST)

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