Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups

Author information

Hiroto Kudo
Department of Chemistry and Materials Engineering, Faculty of Chemistry, Materials and Bioengineering, Kansai University
Nobumitssu Nina
Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University
Tomoharu Sato
Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University
Hiroaki Oizumi
Selete (Semiconductor Leading Edge technologies, Inc.) Research Dept.3
Toshiro Itani
Selete (Semiconductor Leading Edge technologies, Inc.) Research Dept.3
Tokuro Miura
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
Takeo Watanabe
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
Hiroo Kinoshita
Laboratory of Advanced Science and Technology for Industry, University of Hyogo

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2012 Volume 25 Issue 5 Pages 587-592

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