Synthesis of Novel Monodispersed Dendritic Base Amplifiers to Apply to Negative-tone Photoresists

Ken’ichi Aoki; Tsutsumu Hashimoto; Kunihiro Ichimura

doi:10.2494/photopolymer.27.529

Ken’ichi Aoki, Tsutsumu Hashimoto, Kunihiro Ichimura

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Keywords: dendrimer, base amplifier, base proliferation reaction, photoresist

JOURNAL FREE ACCESS

2014 Volume 27 Issue 4 Pages 529-530

DOI https://doi.org/10.2494/photopolymer.27.529

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Abstract

Base-amplifying and following closslinking reactions of epoxy resins were accelerated in films by using the novel monodispersed base amplifiers, which contributes to the practical application of the negative-tone photoresists with excellent photosensitivity.

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