Development of Nanoimprint Lithography Template Materials using Biomass

抄録

A template using biomass materials in nanoimprint lithography has gas permeability that is expected to reduce defects from air trapping and template damage. The dependences of indentation elastic modulus, light transmission rate and oxygen gas permeability coefficient on baking temperature of the biomass template were evaluated. It was found that indentation elastic modulus increased but light transmission rate and oxygen gas permeability decreased with increasing the baking temperature. 5µm and 1µm line regularly-nanostructures of master template were successfully transferred to biomass template. The gas permeable biomass template having nanostructure is expected to extend to future research, such as templates for imprinting volatile materials and solvent including materials.