Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Three Dimensional Assembly in Directed Self-assembly of Block Copolymers
Tamar Segal-PeretzChun ZhouJiaxing RenTakahiro DazaiLeonidas E. OcolaRalu N. S. DivanPaul F. Nealey
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2016 Volume 29 Issue 5 Pages 653-657

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Abstract

The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.

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© 2016 The Society of Photopolymer Science and Technology (SPST)
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