2017 Volume 30 Issue 3 Pages 325-330
In this study, optical emission spectroscopy was used to investigate the advantages of using NH3 and water with Ar gas plasma. To compare the plasma characteristics of N2, NH3, and Ar plasma, Ar/H2O vapor and Ar/NH3-H2O were investigated. The results show that RF-ICP is non-thermal plasma with Te higher than Tg, especially in air, N2, and Ar/NH3-H2O plasma with Te of about 32,500 K (ca. 2.5 eV), Tν of about 7000 K (ca. 0.5 eV), Tr of about 1000 K, and Tg of about 320 K. In the Ar/NH3-H2O plasma, similar to the Ar/H2O plasma, water dissociated readily to form OH and H I radicals, and the high H I concentration makes NH3 suppressed the dissociation reaction and may proposed ionization reaction to form NH3+ ion that minimum pressure change. In the PTFE surface treatment with Ar/NH3-H2O plasma, the suppression of NH3 dissociation may be caused by the increased formation of NH3+, which is the main factor in promoting defluorination. The high OH radical concentration may increase the number of polar groups grafted to the polymer surface, decreasing the WCA and making the PTFE surface super hydrophilic after treatment.