In-Situ Measurement of Outgassing Generated from EUV Metal Oxide Nanoparticles Resist During Electron Irradiation

Abstract

In this study, we prepared the EUV metal resist, which included ZrO₂ nano-particle and three type ligands as 2-methyl-2-propenoic acid (MAA), 2-methylpropanoic acid (IBA) and vinylbenzoic acid (VBA). Each resist was prepared by blending each material separately for evaluating the outgassing from EUV resist materials. We prepared three-type samples of ZrO₂-MAA, ZrO₂-IBA and ZrO₂-VBA by coating each resist, and evaluated the outgassing from these samples during irradiation of 2 keV electron by in-situ mass spectrometry. From the results of mass spectrum, we could observe the outgassing of PAG as unique peaks. And each ligand peak was distributed over the low mass range. On the other hand, the ZrO₂ peaks could not be observe in mass spectrum of each sample. Thus, we guess that ZrO₂ nano-particles might not be evaporating during 2 keV electron irradiation.