Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
APPLICATION OF PHOTOSENSITIVE SILICONE-CONTAINING GRAFT POLYMERS SYNTHESIZED FROM MACROMONOMER TO MICRO LITHOGRAPHY
Yoshio TACHIBANA, Yasutaro YASUDA, Ken-ichi KOSEKI, Tsuguo YAMAOKA
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1988 Volume 1 Issue 2 Pages 220-221

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© The Technical Association of Photopolymers, Japan
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