Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
RELATIONSHIP BETWEEN REMAINING SOLVENT AND DIFFUSION OF ACID IN CHEMICAL AMPLIFICATION RESISTS
KOJI ASAKAWA, TOHRU USHIROGOUCHI, MAKOTO NAKASE
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1994 Volume 7 Issue 3 Pages 497-500

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© The Technical Association of Photopolymers, Japan
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