Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : C39
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Host: The Japan Society of Precision Engineering

Basic Research on Thick Resist Pattern Replication by Matrix Projection Exposure Using a Liquid Crystal Display Panel
*Ayaka Otani, Reiko Kishi, Toshiyuki Horiuchi
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Keywords: Optical Lithography, Liquid Crystal, Matrix Projection Exposure, Thick Resist
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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