Development of 6-axis Stage Driven by Piezoelectric actuator for Using in Vacuum and Non-magnetic environments

Abstract

This paper presents a 6–axis stage driven by piezoelectric actuatoer for using in vacuum and non–magnetic environment. ″Semi–parallel link structure″ is applied to get high stiffness and long travel stroke. Following experimental results are achieved 1)position stability is less than 3nm(3σ) in both X and Y direction. 2)setting time is less than 50msec for a 1–µm step motion. 3)resolution of movement is 3nm. 4)travel stroke of X, Y and Z–axis are more than 80µm.