Development of 6 axis ultrahigh precision machine tool for the fabrication of ultrahigh precisoin die with complicated aspherical surface

Abstract

There are increasing demands for complicated non-axis-symmetric ultraprecision aspheric mold for storage, display devices. To realize efficient fabrication of such ultrahigh precision surfaces, a new machine tool is being developed. It is based on a ultrahigh precision machine tool shipped with linear motor and has a precision fast motion stage with large piezo actuator. Basic characteristics of those components are reported.