Abstract
In this study, ultrasonic assisted polishing method is proposed and developed in order to finish micro axis-symmetric aspherical dies that were ground with a diamond wheel. In the proposed method, a micro polyurethane tool was used and ultrasonic vibration was applied to loose super abrasive particles under constant pressure. The tool scanning speed was controlled with a controller. As the tool does not rotate, this method was berried to smaller aspherical surface than ever. In this paper, as the workpiece, an aspherical die plated the electroless nickel was used and the form deviation and the surface roughness was improved by proposed polishing method.