マイクロレンズアレイ成形型の超精密加工(第2報) オフセット研削法における高精度化

山本 雄士; 鈴木 浩文; 沖野 正; 馬越 聖剛; 土方 祥雄; 森脇 俊道; 星谷 清春; 山口 哲宏; 澁谷 秀雄

doi:10.11522/pscjspe.2005S.0.485.0

2005 JSPE Spring Meeting

Session ID : I76

DOI https://doi.org/10.11522/pscjspe.2005S.0.485.0

Conference information

Host: The Japan Society for Precision Engineering

Precision Machining of Micro Lens Array Molding Die (2nd Report)

*Yuji Yamamoto, Hirofumi Suzuki, Tadashi Okino, Masatake Umakoshi, Yoshio Hijikata, Toshimichi Moriwaki, Kiyoharu Hoshiya, Tetsuhiro Yamaguchi, Hideo Shibutani

Author information

Keywords: micro array lens molding die, off-set grinding method, optical components, form accuracy

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

This paper deals with a precision grinding of Micro Lens Array Molding die. Ultra-precision grinding system of Micro Lens Array surface was developed. In this system, a resinoid bonded diamond wheel was scanned on the workpiece surface 4-dimentionally (X, Y, Z, C) controlled with 1nm resolution by linear motor system.

Corresponding author

Register with J-STAGE for free!