精密工学会学術講演会講演論文集
2005年度精密工学会春季大会
セッションID: I80
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超精密加工機とその要素技術
(キーノートスピーチ)
*Jeffrey W. Roblee
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会議録・要旨集 フリー

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The demand for optics with non-rotationally symmetric (NRS) surfaces has been growing in recent years. This paper examines some of the latest developments in single point diamond turning (SPDT) technology that permit these surfaces to be manufactured in a cost effective way. With some of these techniques it is possible to achieve surfaces with better than 3 nm Ra surface finish and 200 nm form error. Characteristics of each of the five basic system elements are considered: Command Generator, Compensation Filters, Power Electronics/Actuator, Mechanics and Position Sensors.
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© 2005 公益社団法人 精密工学会
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