Abstract
It is necessary for construction of next-generation linear collider with TeV of acceleration energy to realize straightness measurement with accuracy of several tens of micrometers for several tens kilometers of overall measurement length. Multi-probe methods are promising, because they are hardly affected by feeding-guide error. On the other hand, stitching methods have been used in order to enhance measurement limit in various fields. Their repeatability was analyzed and estimated considering system parameters following the error propagation principle. As a result, autocollimation and two probe method are predicted to have better repeatability.