抄録
The standing wave type cylindrical ultrasonic linear microactuator (CULM) is introduced in this paper, including the structure of the CULM, the driving principle and the experiments of CULM. CULM is composed by a hollow cylindrical stator and a slider pipe which is loaded on the outsider of the stator, whose size is about 2mm in diameter and 12 mm in length. The cylindrical stator is consisted of a hollow cylindrical piezoelectric ceramic pipe (PZT pipe) and an elastic material-thin film metallic glass pipe (TFMG pipe) on the surface of the PZT pipe. The PZT pipe has 2 inner electrodes. Using properly selected driving signals loaded on these electrodes, the TFMG pipe would vibrates in r direction while the PZT pipe vibrates in z direction, these two direction vibrations compose an elliptical motion, which drives the slider pipe to move linearly in axial direction. The driving principle of CULM is simulated using FEM software, getting the elliptical motion. In experiments, the linear motion of the slider pipe is observed. The motion of the slider pipe driven by the elliptical motion is identified, measured and compared with the simulation results.
