抄録
The miniaturization of the cylindrical ultrasonic linear microactuator (CULM) is introduced. The length and diameter of the stator are 10 and 1.5mm, respectively. In the driving mechanism, the fourth eigen mode of PZT pipe is used, and inner electrode of PZT pipe is separated into three parts. The stator consists of a cylindrical piezoelectric ceramic element (PZT) and elastic material - thin film metallic glass (TFMG). The vibration on PZT surface is amplified by elastic material under the actuating voltage at the resonance frequency. The rotor, a stainless pipe with high precision, can be driven to move linearly by the friction generated in the interface between stator and rotor. The experimental process is described in detailed, and the vibration characteristics of the stator are investigated using Laser Doppler Vibrometer system. Furthermore, the performance of the prototype is evaluated.
