抄録
To develop a high precision Micro Coordinate Measuring Machine (Micro-CMM), it is important to evaluate an XY stage on the Micro-CMM. In this paper, pre-experiment of multi-probe method is designed for evaluating the XY stage based on a stepping motor system. In the pre-experiment, one autocollimator measures the yaw error of the stage, and the applications of multi-laser interferometers are being discussed the effects of the multi-probe method.
