2011 JSPE Autumn Conference
Session ID : F39
Conference information
Host: The Japan Society for Precision Engineering
Study on Quantitative Evaluation of Micro Deformation Distribution Characteristics for Polishing Pad Surface Texture
Relationship between Pad Micro Deformation Distribution Characteristics and Quantitative Evaluation results using Image Rotation Prism
Keywords:
Polishing,
Digital image correlation method,
Polishing pad,
Micro deformation distribution,
Contact Image Analysis
Details
