Evaluation of Size and Deformation Mode Dependencies on the Mechanical Strength of Single-Crystal Silicon Micro Beam Specimen

Proceedings of JSPE Semestrial Meeting

2011 JSPE Autumn Conference

Session ID : P31

DOI https://doi.org/10.11522/pscjspe.2011A.0.980.0

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Host: The Japan Society for Precision Engineering

Evaluation of Size and Deformation Mode Dependencies on the Mechanical Strength of Single-Crystal Silicon Micro Beam Specimen

*Hiroya Yamagiwa, Tatsuya Fujii, Takahiro Namazu, Masaaki Saito, Kiyotaka Yamada, Takahiro Miyatake

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Keywords: fracture strength, torsion beam, size dependency, deformable mode

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Abstract

[in Japanese]

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© 2011 The Japan Society for Precision Engineering

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