2011 JSPE Autumn Conference
Session ID : P32
Conference information
Host: The Japan Society for Precision Engineering
Mechanical Characterization of SU-8 Micro Structures for the Long-Term Reliability of MEMS Mirror Devices
*Toshiyuki Morikaku, Yoshinori Kaibara, Takahiro Namazu, Masatoshi Inoue, Takuya Miura, Takaaki Suzuki, Fumikazu Oohira, Shozo Inoue, Keisuke Yoshiki
Author information
Keywords:
SU8
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