Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : D15
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Study on Characteristics of Polishing Slurry for Glass Materials with Microscopical Observations
*Yishen LuKensuke Tsuchiya
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Abstract
With Microscopical Observations using laser microscope and atmospheric scanning electron microscope (ASEM), study has been made on dispersion and cohesion statuses of abrasive particles and/or polymer particles in polishing slurries for glass materials, as well as the slurries′ settling and polishing characteristics. In this report, results of effects of such factors as particles concentrations, dispersion agency concentrations and kinds of particles will be dealt with.
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© 2011 The Japan Society for Precision Engineering
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