Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : E34
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Host: The Japan Society for Precision Engineering

Study on EPD grinding with oxidizing agent
Grinding efficiency of Si and SiC
*Yoshito Sato, Masayuki Kobayashi, jyunichi Ikeno, Hideo Shibutani
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Keywords: mirror grinding, silicon, SiC
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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