抄録
Micro-aspheric lenses molded by micro-aspheric ceramic molds are increasing in the optical systems such as digital cameras and blu-ray players. To finish the molds with high accuracy and low surface roughness, in this paper, the micro-aspheric polishing experiments are conducted by using the developed 5-axis magnetostrictive vibration-assisted polishing machine. The magnetostrictive vibrating polisher can generate a lateral vibration at 9.2 kHz with the amplitude of 30 μm and the polishing pressure is controlled by a balance adjustment mechanism. The motion resolution of the X-Y-Z table is 0.1 μm in each direction. The C-axis rotary table is mounted on a B-axis tilting table and the workpiece is mounted on the C-axis rotary table with a vacuum chuck. According to the polishing experiments, the form accuracy was improved to 200 nm P-V and the surface roughness to 10 nm Rz (1 nm Ra).
