抄録
A new fabrication method of multilayer ordered nano-dot array structures with low cost is developed in this paper. First layer ordered nano-dot array is fabricated by nano plastic forming and thermal dewetting, and then it is coated with a transparent silica spacer layer. Multilayer nano-dot structures are produced by repeating gold coating, dewetting and silica coating process. Effective parameters influencing the second layer dots ordering including gold layer thickness and silica spacer layer thickness are investigated. Mechanism of second layer dots formation is also studied. It is confirmed that regular ordered 3D nano-dot array can be obtained by optimizing the thickness of silica spacer layer and gold layer.
