Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : Q03
Conference information

Host: The Japan Society for Precision Engineering

[title in Japanese]
*Koki Oyama, Toshiro K. Doi, Syuhei Kurokawa, Yasuhisa Sano, Hideo Aida, Kunimitsu Takahashi, Hidetoshi Takeda, Keiichi Tsukamoto, Wen Yong Ji, Tsutomu Yamazaki, Koji Koyama
Author information
Keywords: Diamond, Precision processing, CMP, Femtosecond-laser, Pseudo-radical
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (509K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2013 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top