Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J37
Conference information

Host: The Japan Society for Precision Engineering

EHL analysis of CMP process with airbag type polishing head
*Masakazu Asaba, Norikazu Suzuki, Eiji Shamoto, Hozumi Yasuda, Satoru Yamaki
Author information
Keywords: CMP, EHL Analysis, Dynamic structure analysis, Polishing head
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (595K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2013 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top