Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J38
Conference information

Host: The Japan Society for Precision Engineering

Fabrication of a nonwarped wafer by polishing (3rd Report)
Cooling characteristics and application to polishing of a freezing pin chuck
*Kenichiro Yoshitomi, Katsunori Takehana, Atsunobu Une, Masaaki Mochida
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Keywords: polishing, freezing pin chuck, warpage, nondeforming chuck, quartz plate
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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