Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J46
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Host: The Japan Society for Precision Engineering

[title in Japanese]
Miyo Muto, Kiyoshi Seshimo, *Syuhei Kurokawa, Toshiro Doi, Yoji Umezaki, Tsutomu Yamasaki
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Keywords: CMP, manganese oxide, glass
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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