Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : A78
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Host: The Japan Society for Precision Engineering

Surface shape measurement of transparent plate using phase extraction algorithm compensating quadratic nonlinearity
*Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi
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Keywords: Phase extraction algorithm, Wavelength scanning, phase-shifting interferometer, Surface shape
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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