Proceedings of JSPE Semestrial Meeting
2016 JSPE Autumn Conference
Session ID : D73
Conference information

Host: The Japan Society for Precision Engineering

Name : 2016 JSPE Autumn Conference

Location : [in Japanese]

Date : September 06, 2016 - September 08, 2016

Analysis of dynamic material properties based on asperity model of polishing pad surfaces
*Shingo Oshika, Norikazu Suzuki, Yohei Hashimoto, Eiji Shamoto
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Keywords: CMP, polishing pad, material property
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Abstract
[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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