2016 JSPE Spring Conference
Session ID : E68
Conference information
Host: The Japan Society for Precision Engineering
High efficient precision processing for hard-to-process materials (6th report)
CMP characteristics of pseudo-radical site induced substrates by femtosecond laser irradiation
*Syuhei Kurokawa, Chengwu Wang, Toshiro Doi, Yasuhisa Sano, Hideo Aida, Koki Oyama, Terutake Hayashi, Noboru Fukiharu
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