Proceedings of JSPE Semestrial Meeting
2017 JSPE Autumn Conference
Session ID : A06
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Autumn Conference

Location : [in Japanese]

Date : September 20, 2017 - September 22, 2017

CMP Characteristics of Quartz Glass Substrates by Aggregated Colloidal Ceria Slurry
*Shuhei Kurokawa, Takaaki Toyama, Terutake Hayashi, Eisaku Suda, Jun Tokuda
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Keywords: polishing, CMP, Seria, Quartz Glass
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[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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