2018 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2018 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2018 - March 17, 2018
[title in Japanese]
*Yoshimasa Aoyama, Jingxiang Xu, Yusuke Ootani, Nobuki Ozawa, Momoji Kubo, Takuya Igarashi
Author information
Keywords:
chemical mechanical polishing,
molecular dynamics method,
semiconductor material,
fine bubble,
nanojet
Pages 453-454
Details
