精密工学会学術講演会講演論文集
2020年度精密工学会秋季大会
会議情報

平面磁気研磨法の平面品質を改善に関する研究
*張 玉龍鄒 艶華謝 恵君
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会議録・要旨集 フリー

p. 170-171

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抄録

Magnetic abrasive finishing (MAF) is a precision surface polishing method, and it has been widely used in semiconductors, optics, aerospace industry, etc. At present, most studies on planar MAF are focused on improving the surface roughness accuracy. In practical applications, the initial surface of the workpiece is both rough and convex or concave. While the traditional processing method improves the surface roughness accuracy, the original surface is hardly unchanged. This paper proposes a finishing method of variable speed in different regions based on the initial surface of workpiece. According to the characteristics of the magnetic brush is distributed on the edge of the magnetic pole, it is regarded as composed of two left and right half circles. During the processing, the left and right parts will process twice at the same position of the workpiece. The finishing method in this paper makes the total processing time longer where the initial surface is high, while the total processing time is shorter where the initial surface is low, thereby achieving the purpose of improving the surface smoothness. This paper also verified the feasibility and effectiveness of this method through simulation and experiment.

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