精密工学会学術講演会講演論文集
2020年度精密工学会春季大会
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plAn actuation and measurement system of mechanical step displacements with pico-meter resolution using single phase-locked loop, heterodyne interferometry, and piezoelectric driving stage
*NGUYEN Thanh DongIWAFUNE KosukeWEI DongAKETAGAWA Masato
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p. 25-26

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The paper aims to show the possibility of the actuation and the measurement of mechanical step displacements of 10 picometers or less than using a designed piezoelectric (PZT) driving stage and heterodyne interferometry. In our experiment, we use a designed parallel spring stage made by LEX-ZERO (low thermal expansion material) with a high-voltage PZT actuator (0 to -1000 V) to generate mechanical displacements with a step of 10 pm or less than. For a measurement system to achieve these picometer-order displacement measurements, the proposed single phase-locked loop [1] developed on a field-programmable gate array (FPGA) platform aiming to high-resolution phase measurement is used, and a modified heterodyne interferometer with two spatially separated beams is established. Both the actuation and measurement systems are located inside a vacuum chamber for suppressing environmental fluctuations that impact the measurement results. In this paper, the design, instrumentation, and experimental results are discussed. Reference [1] T-D Nguyen, et al., Direct phase determination using phase lock loop for heterodyne displacement-measuring interferometers, Proceedings of Photonic Asia Conference, 2018.

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