主催: 公益社団法人精密工学会
会議名: 2024年度精密工学会春季大会
開催地: 東京大学
開催日: 2024/03/12 - 2024/03/14
p. 634-635
This study aims to augment the antifouling properties of glass electrodes utilized in wireless rumen pH sensors by introducing a new type of flat glass electrode with modified surface topography. This modification comprises three distinct topographical configurations: Line and Space, Holes, and Pillars, each with dimensions ranging from 1 µm to 3 µm, a pitch between 2 µm to 6 µm, and a uniform depth of 1 µm. Employing sophisticated fabrication methods, these patterns were created using a synergistic application of photolithography, electron beam lithography, along with both wet and dry etching processes. Post-fabrication, the antifouling performance of these topographical interventions was rigorously evaluated through in vitro assay experiments.