Proceedings of JSPE Semestrial Meeting
2024 JSPE Spring Conference
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Host: The Japan Society for Precision Engineering

Name : 2024 JSPE Spring Conference

Location : [in Japanese]

Date : March 12, 2024 - March 14, 2024

History and accuracy of molding 2
*Jun Taniguchi
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Keywords: nanoimprint, mold, transfer
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 653

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Abstract

Nanoimprint lithography is one of the pattern transfer method using mold. Outline of fabrication methods for nano-mold and its limitation are discussed.

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© 2024 The Japan Society for Precision Engineering
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