Proceedings of the Annual Conference of the Institute of Systems, Control and Information Engineers
The 48th Annual Conference of the Institute of Systems, Control and Information Engineers
Session ID : 3029
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System design for improving productivity in a semiconductor production line
*Tomoyuki Soda, Michiyuki Shimizu, Yoshio Iwata, Yoshihito Kominato, Hiroyuki Tamura
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Keywords: Semiconductor Production Line, Re-entrant Flowshop, Single Wafer Processing Equipment for Semiconductor Production, Batch Processing Equipment for Semiconductor Production
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Abstract
In this paper a semiconductor production line with re-entrant flowshop is modeled. By using this model we evaluate cycle time of production both for the production line with batch type equipment and for the production line with non-batch type equipment. Then, we try to find the parameter values in each type of production line to get better efficiency of production.
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© 2004 The Institute of Systems, Control and Information Engineers
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