2003 年 54 巻 11 号 p. 745-748
The bombardment of intense pulsed ion beam has been shown leading many physical and chemical effects. As a flash heating source, it produced a fast heating and cooling process in the region near the surface of target. Besides the evidence of formation of amorphous layer and phase transformation, there were many craters of various kinds found on the surface of target.
In this paper, we studied the distributions of these craters according to the beam parameters such as ion energy (accelerating voltage), beam current density, pulse number, etc.. These beam parameters are 250 keV of ion energy, 72～200 A/cm2 of beam current density, 60 ns of pulse duration and 2～24 of pulse number, respectively. The surface morphology was observed with SEM and the compositions were determined by EDS methods. Also statistical comparisons of crater distributions at different beam parameters were given in the paper. Through our experiments and analysis, we obtained that there are several kinds of craters appeared in our experiment. The size and number of crater varies according the beam parameters. The discussion about the reason of formation of those craters was also given in this paper. And the main factors to form craters on melted surface were the surface energy state distributions and eroded particles from ion sources.