表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
研究論文
高速液体クロマトグラフィ法を用いた硫酸銅めっきの添加剤劣化挙動に関する評価
小倉 圭輔竹内 正樹岩本 卓治木下 慶人柴田 正実
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ジャーナル フリー

2014 年 65 巻 1 号 p. 35-40

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This study examined the influence of degradation of additive agents upon copper sulfate plating, i.e. polyethylene glycol (PEG) as a depressant, Janes green B (JGB) as a leveler, and bis(3-sulfopropyl) disulfide disodium salt (SPS) as a brightener. Trace analysis was conducted in a copper sulfate bath using high performance liquid chromatography (HPLC), which clarified the respective quantitative limits for measurement of PEG, JGB, and SPS as 10 mg/L, 0.01 mg/L, and 0.15 mg/L. The PEG molecule size and the SPS concentration decreased during electroplating. The value of throwing power was particularly lowered by the PEG degradation. Hydrogenation into N,N-dimethyl-p-phenylenediamine and methylene violet decomposed the JGB, thereby lowering the value of throwing power.

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