金属表面技術
Online ISSN : 1884-3395
Print ISSN : 0026-0614
ISSN-L : 0026-0614
無電解ニッケルめっきによる微細パターン加工
本間 英夫水島 信也
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1980 年 31 巻 2 号 p. 91-95

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An electroless nickel deposit on glass has been studied to use as a micro-pattern. For this purpose, metal to glass adhesion and the surface smoothness is substantially important. Good adhesion strength between glass and the deposited nickel obtained by immersing the glass in a the conventional chromic-sulfuric acid etching solution and by treating with sodium hydroxide solution. A high levelling nickel deposit was also obtained by using sodium citrate or ammonium citrate as a condition complexing agent in the electroless nickel bath. The optimum etching composition and operating for the production of micro-patterns were found to be 8% HNO3-70% H3PO4-22% H2O, temperature: 25°C, etching time: 5-7min.
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© (社)表面技術協会
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